CPC H01L 23/642 (2013.01) [H03K 17/693 (2013.01); H04W 88/02 (2013.01); H01L 27/0629 (2013.01); H01L 2924/0002 (2013.01)] | 20 Claims |
1. A radio frequency switch arrangement comprising:
a ground plane;
a stack arranged in relation to the ground plane, the stack including a plurality of switching elements coupled in series with one another; and
a plurality of capacitive elements across one or more of the switching elements provided by a via density of a respective switching element, the via density of the respective switching element determined by a number of vias for the respective switching element, each of the plurality of capacitive elements having a respective capacitive value and each of the plurality of capacitive elements providing a capacitive path across respective terminals of the respective switching element, the number of vias for each of the respective switching elements determined to set the via density of each of the respective switching elements such that the respective capacitive values of the plurality of capacitive elements provided by the via densities of the respective switching elements monotonically increase or monotonically decrease across the stack.
|