CPC H01L 23/53295 (2013.01) [H01L 21/76832 (2013.01); H01L 21/76834 (2013.01)] | 19 Claims |
7. A transmission line, comprising:
a first structure comprising a conductive material,
the first structure having at least one surface;
a second structure including a first layer over the at least one surface of the first structure and comprising a first dielectric material having a first dielectric constant,
a second layer over the first layer,
the second layer being compositionally distinct from the first layer and comprising a second dielectric material having a second dielectric constant, and
a third layer over the second layer and comprising a third dielectric material having a third dielectric constant,
wherein the first dielectric constant is greater than the third dielectric constant and the second dielectric constant is less than the third dielectric constant.
|