US 11,810,810 B2
Contour pocket and hybrid susceptor for wafer uniformity
Kaushal Gangakhedkar, San Jose, CA (US); Kallol Bera, Fremont, CA (US); and Joseph Yudovsky, Campbell, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 12, 2022, as Appl. No. 18/079,589.
Application 18/079,589 is a division of application No. 16/902,253, filed on Jun. 15, 2020, granted, now 11,557,501.
Application 16/902,253 is a division of application No. 15/616,364, filed on Jun. 7, 2017, granted, now 10,685,864, issued on Jun. 16, 2020.
Claims priority of provisional application 62/347,062, filed on Jun. 7, 2016.
Prior Publication US 2023/0116396 A1, Apr. 13, 2023
Int. Cl. H01L 21/687 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/68764 (2013.01) [H01L 21/67017 (2013.01); H01L 21/6838 (2013.01); H01L 21/6875 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); H01L 21/68771 (2013.01); H01L 21/68785 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A susceptor assembly comprising:
a susceptor base;
a plurality of pie-shaped skins on the susceptor base, each of the pie-shaped skins having a recess, the recess having a ledge at an outer peripheral edge of the recess; and
a pie anchor in a center of the susceptor base, the pie anchor configured to cooperatively interact with the pie-shaped skins to hold the pie-shaped skins in place, the pie anchor comprising at least one protrusion and each of the plurality of pie-shaped skins has at least one recess adjacent an inner peripheral edge and sized to cooperatively interact with the at least one protrusion on the pie anchor.