CPC H01L 21/68764 (2013.01) [H01L 21/67017 (2013.01); H01L 21/6838 (2013.01); H01L 21/6875 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); H01L 21/68771 (2013.01); H01L 21/68785 (2013.01)] | 9 Claims |
1. A susceptor assembly comprising:
a susceptor base;
a plurality of pie-shaped skins on the susceptor base, each of the pie-shaped skins having a recess, the recess having a ledge at an outer peripheral edge of the recess; and
a pie anchor in a center of the susceptor base, the pie anchor configured to cooperatively interact with the pie-shaped skins to hold the pie-shaped skins in place, the pie anchor comprising at least one protrusion and each of the plurality of pie-shaped skins has at least one recess adjacent an inner peripheral edge and sized to cooperatively interact with the at least one protrusion on the pie anchor.
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