CPC H01L 21/67389 (2013.01) [C23C 16/54 (2013.01); H01L 21/67242 (2013.01); H01L 21/67772 (2013.01); C23C 16/4408 (2013.01); C23C 16/458 (2013.01); C23C 16/45563 (2013.01); C23C 16/52 (2013.01); H01L 21/67775 (2013.01); Y10T 137/0402 (2015.04)] | 18 Claims |
1. A method comprising:
coupling one or more nozzles of a gas purge apparatus to a substrate carrier;
performing, via the one or more nozzles coupled to the substrate carrier, a first gas purging session of an environment of the substrate carrier;
receiving, by a controller of the gas purge apparatus, a first signal, wherein the first signal is of a first signal type;
responsive to receiving the first signal, keeping the one or more nozzles coupled to the substrate carrier;
performing a second gas purging session of the environment of the substrate carrier via the one or more nozzles coupled to the substrate carrier;
receiving, by the controller of the gas purge apparatus, a second signal, wherein the second signal is of a second signal type; and
responsive to receiving the second signal, decoupling the one or more nozzles from the substrate carrier.
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