CPC H01L 21/67115 (2013.01) [H01L 21/67109 (2013.01); H01L 21/67316 (2013.01)] | 8 Claims |
1. A substrate support for placing a substrate, the substrate support comprising:
a top plate portion having a surface on which a substrate is placed;
a light irradiation mechanism that includes a plurality of light-emitting elements, is disposed to face the substrate placed on the top plate portion, and heats the substrate using light emitted from the light-emitting elements;
a channel-forming member that transmits the light emitted from the light-emitting elements and is directly bonded to a rear surface of the top plate portion so as to be interposed between the top plate portion and the light irradiation mechanism, wherein refrigerant channels are formed between the channel-forming member and the top plate portion, a refrigerant, which transmits the light emitted from the light-emitting elements, flows through the refrigerant channels, and the top plate portion and the channel-forming member are made of materials having different thermal expansion coefficients;
a temperature adjustment part configured to adjust a temperature of the channel-forming member;
a cooling unit configured to cool a driving unit for driving the light-emitting elements using a refrigerant; and
a controller configured to control the temperature adjustment part,
wherein the controller controls the temperature adjustment part such that the channel-forming member is at a temperature at which the top plate portion is not warped, and said temperature is calculated based on a temperature of the top plate portion, a temperature of the refrigerant of the refrigerant channel and a temperature of the refrigerant of the cooling unit.
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