US 11,810,769 B2
Piping assembly and substrate processing apparatus
Kazuki Oshima, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Nov. 25, 2020, as Appl. No. 17/104,499.
Claims priority of application No. 2019-215691 (JP), filed on Nov. 28, 2019.
Prior Publication US 2021/0166958 A1, Jun. 3, 2021
Int. Cl. H01J 37/32 (2006.01); H01L 21/683 (2006.01); C23C 16/458 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); C23C 16/46 (2006.01)
CPC H01J 37/32715 (2013.01) [C23C 16/4586 (2013.01); H01J 37/32724 (2013.01); H01L 21/6833 (2013.01); H01L 21/68792 (2013.01); C23C 16/466 (2013.01); H01J 37/3244 (2013.01); H01J 37/32091 (2013.01); H01L 21/67069 (2013.01); H01L 21/67109 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprising:
a conductive enclosure having a gas passage, the conductive enclosure being grounded;
a substrate support disposed in the conductive enclosure, the substrate support including a conductive member having a gas passage;
a power source connected to the conductive member; and
a piping assembly disposed between the conductive enclosure and the conductive member, the piping assembly being configured to supply a gas from an outside of the conductive enclosure to the gas passage of the conductive member through the gas passage of the conductive enclosure,
the piping assembly including:
a hollow tube having an inner sidewall, the hollow tube being made of a resin;
a core block disposed in the hollow tube, the core block having an outer sidewall fitting the inner sidewall of the hollow tube, the core block being made of a resin;
a first annular dielectric member embedded in the hollow tube, the first annular dielectric member comprising a material selected from the group consisting of quartz, ceramics, silicon, and metals; and
a second annular dielectric member embedded in the core block, the second annular dielectric member comprising a material selected from the group consisting of quartz, ceramics, silicon, and metals,
wherein at least one of the inner sidewall of the hollow tube and the outer sidewall of the core block has at least one spiral groove, the at least one spiral groove defines an internal passage having a first opening and a second opening, the first opening is in fluid communication with the gas passage of the conductive member, and the second opening is in fluid communication with the gas passage of the conductive enclosure, and
wherein dielectric constants of the first annular dielectric member and the second annular dielectric member are higher than those of the hollow tube and the core block.