US 11,810,766 B2
Protection of aluminum process chamber components
Karthikeyan Balaraman, Bangalore (IN); Sathyanarayana Bindiganavale, Bengaluru (IN); Rajasekhar Patibandla, Bangalore (IN); Balamurugan Ramasamy, Bangalore (IN); Kartik Shah, Saratoga, CA (US); Umesh M. Kelkar, Santa Clara, CA (US); Mats Larsson, Sunnyvale, CA (US); Kevin A. Papke, Portland, OR (US); and William M. Lu, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 2, 2019, as Appl. No. 16/401,871.
Claims priority of provisional application 62/694,305, filed on Jul. 5, 2018.
Prior Publication US 2020/0013589 A1, Jan. 9, 2020
Int. Cl. H01J 37/32 (2006.01); H01L 21/687 (2006.01); C23C 16/34 (2006.01); C23C 14/06 (2006.01); C23C 16/06 (2006.01); C23C 14/16 (2006.01)
CPC H01J 37/32477 (2013.01) [C23C 14/0641 (2013.01); C23C 14/16 (2013.01); C23C 16/06 (2013.01); C23C 16/34 (2013.01); H01L 21/68757 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A coated chamber component comprising:
a chamber component configured to be used in a processing volume of a chamber, the chamber component comprising an aluminum alloy; and
a multilayer coating having a thickness of 250 microns to 600 microns, comprising:
a first layer comprising titanium nitride disposed on and in contact with the chamber component; and
a second layer comprising tungsten nitride disposed on and in contact with the first layer, wherein a ratio of thickness of the first layer to thickness of the second layer is 1:1 to 1:3, wherein the second layer has an internal tensile stress, wherein the first layer has an internal compressive stress, and wherein the chamber component has an internal tensile stress.