CPC H01J 37/32477 (2013.01) [C23C 14/0641 (2013.01); C23C 14/16 (2013.01); C23C 16/06 (2013.01); C23C 16/34 (2013.01); H01L 21/68757 (2013.01)] | 20 Claims |
1. A coated chamber component comprising:
a chamber component configured to be used in a processing volume of a chamber, the chamber component comprising an aluminum alloy; and
a multilayer coating having a thickness of 250 microns to 600 microns, comprising:
a first layer comprising titanium nitride disposed on and in contact with the chamber component; and
a second layer comprising tungsten nitride disposed on and in contact with the first layer, wherein a ratio of thickness of the first layer to thickness of the second layer is 1:1 to 1:3, wherein the second layer has an internal tensile stress, wherein the first layer has an internal compressive stress, and wherein the chamber component has an internal tensile stress.
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