US 11,810,761 B2
Nanosecond pulser ADC system
Ilia Slobodov, Seattle, WA (US); John Carscadden, Seattle, WA (US); Kenneth Miller, Seattle, WA (US); Timothy Ziemba, Bainbridge Island, WA (US); Huatsern Yeager, Olympia, WA (US); Eric Hanson, Kingston, WA (US); TaiSheng Yeager, Seattle, WA (US); Kevin Muggli, Mountlake Terrace, WA (US); Morgan Quinley, Seattle, WA (US); James Prager, Seattle, WA (US); and Connor Liston, Seattle, WA (US)
Assigned to Eagle Harbor Technologies, Inc., Seattle, WA (US)
Filed by Eagle Harbor Technologies, Inc., Seattle, WA (US)
Filed on Aug. 24, 2021, as Appl. No. 17/411,028.
Application 17/411,028 is a continuation in part of application No. 17/231,923, filed on Apr. 15, 2021, granted, now 11,587,768.
Application 17/231,923 is a continuation in part of application No. 17/142,069, filed on Jan. 5, 2021.
Application 17/142,069 is a continuation in part of application No. 16/848,830, filed on Apr. 14, 2020, granted, now 11,101,108.
Application 16/848,830 is a continuation in part of application No. 16/722,115, filed on Dec. 20, 2019, granted, now 11,222,767.
Application 16/722,115 is a continuation in part of application No. 16/721,396, filed on Dec. 19, 2019, granted, now 11,075,058.
Application 16/721,396 is a continuation in part of application No. 16/537,513, filed on Aug. 9, 2019, granted, now 11,227,745.
Application 16/848,830 is a continuation of application No. 16/525,357, filed on Jul. 29, 2019, granted, now 10,659,019.
Application 17/231,923 is a continuation of application No. 16/524,926, filed on Jul. 29, 2019, granted, now 10,991,553, issued on Apr. 27, 2021.
Application 16/721,396 is a continuation of application No. 16/524,967, filed on Jul. 29, 2019, granted, now 10,811,230, issued on Jul. 27, 2021.
Application 17/142,069 is a continuation of application No. 16/524,950, filed on Jul. 29, 2019, granted, now 10,892,141, issued on Jan. 12, 2021.
Application 16/722,115 is a continuation in part of application No. 16/523,840, filed on Jul. 26, 2019, granted, now 10,892,140, issued on Jan. 12, 2021.
Application 16/524,967 is a continuation in part of application No. 16/523,840, filed on Jul. 26, 2019, granted, now 10,892,140, issued on Jan. 12, 2021.
Application 16/524,950 is a continuation in part of application No. 16/523,840, filed on Jul. 26, 2019, granted, now 10,892,140, issued on Jan. 12, 2021.
Application 16/525,357 is a continuation of application No. 16/523,840, filed on Jul. 26, 2019, granted, now 10,892,140, issued on Jan. 12, 2021.
Application 16/524,926 is a continuation in part of application No. 16/523,840, filed on Jul. 26, 2019, granted, now 10,892,140, issued on Jan. 12, 2021.
Application 16/722,115 is a continuation in part of application No. 16/178,565, filed on Nov. 1, 2018, granted, now 10,607,814, issued on Mar. 31, 2020.
Claims priority of provisional application 62/789,523, filed on Jan. 8, 2019.
Claims priority of provisional application 62/789,526, filed on Jan. 8, 2019.
Claims priority of provisional application 62/774,078, filed on Nov. 30, 2018.
Claims priority of provisional application 62/717,523, filed on Aug. 10, 2018.
Claims priority of provisional application 62/717,637, filed on Aug. 10, 2018.
Claims priority of provisional application 62/711,347, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,457, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,406, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,467, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,468, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,334, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,464, filed on Jul. 27, 2018.
Prior Publication US 2022/0020566 A1, Jan. 20, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H02M 3/335 (2006.01); H03K 3/57 (2006.01); H05K 7/20 (2006.01); H03M 1/12 (2006.01)
CPC H01J 37/32146 (2013.01) [H01J 37/32082 (2013.01); H01J 37/32091 (2013.01); H01J 37/32128 (2013.01); H01J 37/32174 (2013.01); H01J 37/32541 (2013.01); H01J 37/32568 (2013.01); H01J 37/32715 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); H02M 3/33523 (2013.01); H03K 3/57 (2013.01); H03M 1/12 (2013.01); H05K 7/20154 (2013.01); H05K 7/20172 (2013.01); H05K 7/20254 (2013.01); H05K 7/20272 (2013.01); H05K 7/20281 (2013.01); H05K 7/20509 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A nanosecond pulser system comprising:
a nanosecond pulser comprising:
a pulser input;
a high voltage DC power supply;
one or more solid-state switches coupled with the high voltage DC power supply and the pulser input, the one or more solid-state switches switching the high voltage DC power supply based on input pulses provided by the pulser input; and
a pulser output coupled with the one or more solid-state switches, the pulser output outputs a high voltage waveform with an amplitude greater than about 2 kV and a pulse repetition frequency greater than about 1 kHz based on the pulser input;
a plasma chamber;
an electrode disposed within the plasma chamber and coupled with the pulser output;
one or more sensors that sense characteristics of the nanosecond pulser system at at least one measurement point; and
a control system electrically coupled with the pulser input and the one or more sensors, the control system receives input from the one or more sensors and sends signals to the nanosecond pulser system to produce input pulses with certain characteristics.