CPC H01J 37/222 (2013.01) [H01J 37/05 (2013.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 2237/221 (2013.01); H01J 2237/226 (2013.01)] | 15 Claims |
1. Method of imaging a specimen using a transmission charged particle microscope, said method comprising:
providing the specimen;
directing a charged particle beam onto said specimen;
filtering out inelastically scattered charged particles from a flux of charged particles transmitted through the specimen based on energy-loss to obtain a first energy filtered flux of the charged particles transmitted through the specimen, wherein said first energy filtered flux substantially consists of non-scattered and elastically scattered charged particles;
detecting the first energy filtered flux;
filtering the flux of charged particles transmitted through the specimen based on energy-loss to obtain a second energy filtered flux of the charged particles transmitted through the specimen, wherein said second energy filtered flux of charged particles substantially consists of inelastically scattered charged particles;
generating an image of the specimen based on said detected first energy filtered flux and said detected second energy filtered flux.
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