US 11,810,751 B2
Method of imaging a specimen using a transmission charged particle microscope
Peter Tiemeijer, Eindhoven (NL); Evgeniia Pechnikova, Eindhoven (NL); Rudolf Geurink, Eindhoven (NL); Abhay Kotecha, Eindhoven (NL); and Jamie McCormack, Eindhoven (NL)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Jun. 22, 2021, as Appl. No. 17/354,986.
Claims priority of application No. 20182306 (EP), filed on Jun. 25, 2020.
Prior Publication US 2021/0407762 A1, Dec. 30, 2021
Int. Cl. H01J 37/22 (2006.01); H01J 37/05 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/222 (2013.01) [H01J 37/05 (2013.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 2237/221 (2013.01); H01J 2237/226 (2013.01)] 15 Claims
OG exemplary drawing
 
1. Method of imaging a specimen using a transmission charged particle microscope, said method comprising:
providing the specimen;
directing a charged particle beam onto said specimen;
filtering out inelastically scattered charged particles from a flux of charged particles transmitted through the specimen based on energy-loss to obtain a first energy filtered flux of the charged particles transmitted through the specimen, wherein said first energy filtered flux substantially consists of non-scattered and elastically scattered charged particles;
detecting the first energy filtered flux;
filtering the flux of charged particles transmitted through the specimen based on energy-loss to obtain a second energy filtered flux of the charged particles transmitted through the specimen, wherein said second energy filtered flux of charged particles substantially consists of inelastically scattered charged particles;
generating an image of the specimen based on said detected first energy filtered flux and said detected second energy filtered flux.