US 11,810,746 B2
Variable thickness ion source extraction plate
Alexandre Likhanskii, Middleton, MA (US); Alexander S. Perel, Danvers, MA (US); Jay T. Scheuer, Rowley, MA (US); Bon-Woong Koo, Andover, MA (US); Robert C. Lindberg, Rockport, MA (US); Peter F. Kurunczi, Cambridge, MA (US); and Graham Wright, Newburyport, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 13, 2021, as Appl. No. 17/473,096.
Prior Publication US 2023/0080083 A1, Mar. 16, 2023
Int. Cl. H01J 27/02 (2006.01); H01J 37/08 (2006.01)
CPC H01J 27/024 (2013.01) [H01J 37/08 (2013.01); H01J 2237/0455 (2013.01); H01J 2237/061 (2013.01); H01J 2237/327 (2013.01)] 28 Claims
OG exemplary drawing
 
1. An ion source, comprising:
a chamber comprising a first end, a second end and a plurality of walls connecting the first end and the second end, wherein one of the plurality of walls is an extraction plate having an extraction aperture having a width greater than its height; and
a plasma generator to generate a plasma within the chamber;
wherein the extraction plate comprises a protrusion extending from an interior surface of the extraction plate at least 1 mm at at least one location such that a thickness of the extraction aperture varies as a function of the width of the extraction aperture.