CPC H01J 27/024 (2013.01) [H01J 37/08 (2013.01); H01J 2237/0455 (2013.01); H01J 2237/061 (2013.01); H01J 2237/327 (2013.01)] | 28 Claims |
1. An ion source, comprising:
a chamber comprising a first end, a second end and a plurality of walls connecting the first end and the second end, wherein one of the plurality of walls is an extraction plate having an extraction aperture having a width greater than its height; and
a plasma generator to generate a plasma within the chamber;
wherein the extraction plate comprises a protrusion extending from an interior surface of the extraction plate at least 1 mm at at least one location such that a thickness of the extraction aperture varies as a function of the width of the extraction aperture.
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