US 11,810,727 B2
Lateral tunable dielectric voltage variable capacitor
Troy Randall Taylor, Windham, NH (US)
Filed by Troy Randall Taylor, Windham, NH (US)
Filed on Jan. 21, 2020, as Appl. No. 16/747,978.
Prior Publication US 2021/0225596 A1, Jul. 22, 2021
Int. Cl. H01G 7/06 (2006.01)
CPC H01G 7/06 (2013.01) 5 Claims
OG exemplary drawing
 
1. An interdigitated variable capacitor on a substrate comprising:
a tunable dielectric layer on the substrate;
no metal electrodes under the tunable dielectric layer;
a first interdigitated metal electrode and a second interdigitated metal electrode such that the tunable dielectric layer is under the interdigitated electrodes and in a gap between the interdigitated electrodes;
no tunable dielectric on the top surfaces of the first and second interdigitated metal electrodes;
no metal on the top surface of the tunable dielectric layer in the gap between the interdigitated electrodes;
the top surfaces of the first interdigitated metal electrode, the second interdigitated metal electrode, and the tunable dielectric layer in the gap between the interdigitated electrodes are coplanar.