CPC H01G 7/06 (2013.01) | 5 Claims |
1. An interdigitated variable capacitor on a substrate comprising:
a tunable dielectric layer on the substrate;
no metal electrodes under the tunable dielectric layer;
a first interdigitated metal electrode and a second interdigitated metal electrode such that the tunable dielectric layer is under the interdigitated electrodes and in a gap between the interdigitated electrodes;
no tunable dielectric on the top surfaces of the first and second interdigitated metal electrodes;
no metal on the top surface of the tunable dielectric layer in the gap between the interdigitated electrodes;
the top surfaces of the first interdigitated metal electrode, the second interdigitated metal electrode, and the tunable dielectric layer in the gap between the interdigitated electrodes are coplanar.
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