CPC G03F 7/7015 (2013.01) [G03F 7/702 (2013.01); G03F 7/70025 (2013.01)] | 20 Claims |
1. An apparatus comprising:
a first attenuation unit comprising:
a first housing having a first inlet port, a first reflection outlet port and a first transmission outlet port;
a first reflector disposed in the first housing, which in operation, is positioned to receive a first light beam from the first inlet port, reflect a first reflected portion of the first light beam to the first reflection outlet port and transmit through itself a first transmitted portion of the first light beam to the first transmission outlet port; and
an actuator coupled to the first reflector, wherein the actuator is operable to rotate the first reflector; and
a first optical conduit connected to the first reflection outlet port to direct the first reflected portion of the first light beam from the first attenuation unit.
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