US 11,808,996 B1
Waveguides and edge couplers with multiple-thickness waveguide cores
Yusheng Bian, Ballston Lake, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Apr. 26, 2022, as Appl. No. 17/729,244.
Int. Cl. G02B 6/42 (2006.01)
CPC G02B 6/4206 (2013.01) [G02B 6/42 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A photonics structure comprising:
a waveguide core including a first section, a second section longitudinally adjacent to the first section, a first plurality of segments projecting in a vertical direction from the first section, and a second plurality of segments projecting in the vertical direction from the second section, the first section of the waveguide core having a first thickness, and the second section of the waveguide core having a second thickness that is greater than the first thickness,
wherein the first plurality of segments are separated by a plurality of gaps, a dielectric material is positioned in the plurality of gaps, the first plurality of segments comprise silicon nitride, and the dielectric material comprises silicon dioxide.