US 11,808,995 B2
Edge couplers with non-linear tapers
Yusheng Bian, Ballston Lake, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Mar. 29, 2022, as Appl. No. 17/707,403.
Prior Publication US 2023/0314730 A1, Oct. 5, 2023
Int. Cl. G02B 6/42 (2006.01); G02B 6/122 (2006.01); G02B 6/12 (2006.01)
CPC G02B 6/4203 (2013.01) [G02B 6/1228 (2013.01); G02B 6/12002 (2013.01); G02B 2006/12152 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure for an edge coupler, the structure comprising:
a substrate; and
a back-end-of-line stack located over the substrate, the back-end-of-line stack including a first waveguide core having a first longitudinal axis and a first tapered section with a first width that varies with position along the first longitudinal axis based on a first non-linear function and a second tapered section with a second width that varies with position along the first longitudinal axis based on a second non-linear function, the first tapered section including a first rounded tip, the second tapered section including a second rounded tip spaced along the first longitudinal axis from the first rounded tip, the first width increasing with increasing distance from the first rounded tip, and the second width decreasing with decreasing distance from the second rounded tip.