US 11,808,936 B2
Micro-electromechanical system (MEMS) based tunable polarization rotator
Sujit Handanhal Ramachandra, Allentown, PA (US); Matthew Stewart Johnson, Breinigsville, PA (US); Trang Thu Pham, Worcester, MA (US); and Aidas A. Jakubenas, Canton, MA (US)
Assigned to CISCO TECHNOLOGY, INC., San Jose, CA (US)
Filed by Cisco Technology, Inc., San Jose, CA (US)
Filed on Nov. 15, 2021, as Appl. No. 17/526,252.
Prior Publication US 2023/0152571 A1, May 18, 2023
Int. Cl. G02B 26/00 (2006.01); G02B 27/28 (2006.01)
CPC G02B 26/00 (2013.01) [G02B 27/286 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method comprising:
receiving an optical signal having a first polarization state at a first section of a waveguide, the first section of the waveguide being disposed on a plane of a substrate;
using a micro-electromechanical system (MEMS) device, angling a second section of the waveguide out of the plane of the substrate, the second section of the waveguide being U-shaped; and
outputting the optical signal with a second polarization state, different from the first polarization state, on a third section of the waveguide, the third section of the waveguide also being disposed on the plane of the substrate.