CPC G02B 21/33 (2013.01) [G02B 21/02 (2013.01); G02B 21/16 (2013.01)] | 5 Claims |
1. A liquid immersion objective, comprising:
an objective lens having a prescribed optical power; and
a plurality of planar plates having substantially no optical power and having different thicknesses, and configured to be placed between the objective lens and immersion liquid deposited on a sample to be observed, the planar plates being made of a substantially same material,
wherein the planar plates are selected according to a property of the immersion liquid.
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