US 11,808,929 B2
Quantitative phase image generating method, quantitative phase image generating device, and program
Shota Tsuchida, Tokyo (JP); and Satoshi Ikeda, Yokohama (JP)
Assigned to NIKON CORPORATION, Tokyo (JP)
Filed by NIKON CORPORATION, Tokyo (JP)
Filed on May 14, 2020, as Appl. No. 15/931,995.
Application 15/931,995 is a continuation of application No. PCT/JP2017/040991, filed on Nov. 14, 2017.
Prior Publication US 2020/0271910 A1, Aug. 27, 2020
Int. Cl. G02B 21/00 (2006.01); G01J 9/00 (2006.01); G01J 9/02 (2006.01)
CPC G02B 21/0056 (2013.01) [G01J 9/00 (2013.01); G01J 9/0246 (2013.01); G01J 2009/0211 (2013.01); G01J 2009/0269 (2013.01)] 19 Claims
OG exemplary drawing
 
9. A quantitative phase image generating device comprising a microscope, the microscope comprising:
an illumination optical system that irradiates illumination light upon an object, the object being a phase body;
an objective lens;
a detector that detects light from the object due to the irradiation of illumination light from the illumination optical system; and
a processor configured to
adjust a position of a focal point of the objective lens so that the focal point of the objective lens is disposed at a plurality of positions that are mutually separated by gaps Δz along an optical axis of the objective lens;
generate three-dimensional light intensity distribution data based upon the light detected at each of the plurality of positions; and
generate a quantitative phase image based upon the three-dimensional light intensity distribution data, wherein:
the quantitative phase image is an image including phases obtained by multiplying change in thickness of the object by change of its refractive index;
the processor sets the gap Δz based upon setting information of the microscope; and
the setting information includes at least one of the following: a numerical aperture NA of the objective lens, a wavelength λ of the illumination light, and a refractive index between the objective lens and the object.