CPC G01N 33/0016 (2013.01) [G01N 1/2205 (2013.01); G01N 2001/2282 (2013.01)] | 17 Claims |
1. A gas sensor comprising:
a humidifier configured to add water vapor to a sample gas that contains one or more chemicals at respective levels to be measured;
a first temperature control system configured to heat the sample gas to a first temperature at which the humidifier adds water vapor to the sample gas;
a sensing unit coupled to receive the sample gas from the humidifier, the sensing unit measuring the levels of the one or more chemicals while the sample gas includes the water vapor that the humidifier added; and
a second temperature control system configured to heat the sample gas from the first temperature to a second temperature at which the sensing unit measures the levels of the one or more chemicals.
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