US 11,808,696 B2
Substrate processing apparatus and substrate processing method to suppress alteration of processing liquid
Noboru Matsuyama, Kumamoto (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on May 20, 2022, as Appl. No. 17/749,530.
Application 17/749,530 is a continuation of application No. 16/957,907, granted, now 11,360,019, previously published as PCT/JP2018/046164, filed on Dec. 14, 2018.
Claims priority of application No. 2017-253703 (JP), filed on Dec. 28, 2017.
Prior Publication US 2022/0276155 A1, Sep. 1, 2022
Int. Cl. G01N 21/31 (2006.01); G01N 21/27 (2006.01); G03F 7/20 (2006.01); G01N 21/25 (2006.01); G01N 21/85 (2006.01); H01L 21/67 (2006.01); G03F 7/16 (2006.01)
CPC G01N 21/31 (2013.01) [G01N 21/251 (2013.01); G01N 21/27 (2013.01); G01N 21/85 (2013.01); G03F 7/20 (2013.01); H01L 21/6715 (2013.01); H01L 21/67253 (2013.01); G03F 7/16 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprising:
a first laser and light receiving element including a first lens configured to irradiate a first light to a processing liquid flowing through a flow path supplied from a supply source, receive light irradiated to a portion of the flow path, and output a first signal;
a second laser and light receiving element including a second lens configured to irradiate a second light to an upstream portion than the portion of the flow path, receive light irradiated to the upstream portion, and output a second signal; and
a controller configured to control the first laser and light receiving element and the second laser and light receiving element,
wherein the controller is programmed to:
determine whether color information of the processing liquid flowing through the upstream portion matches predetermined color information that readily absorbs the first light, based on the second signal,
determine whether to irradiate the first light to the processing liquid by the first laser and light receiving element, based on a determination result by the second signal of whether the color information of the processing liquid matches the predetermined color information, and
when determined that the color information of the processing liquid does not match the predetermined color information, irradiate the first light to the processing liquid by the first laser and light receiving element and obtain status of the processing liquid based on the first signal output from the first laser and light receiving element.