US 11,807,932 B2
Mask and method for manufacturing mask
Junho Jo, Seoul (KR); Youngho Park, Suwon-si (KR); Seungyong Song, Suwon-si (KR); Youngchul Lee, Cheonan-si (KR); and Youngsuck Choi, Hwaseong-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Mar. 10, 2021, as Appl. No. 17/197,300.
Claims priority of application No. 10-2020-0091548 (KR), filed on Jul. 23, 2020.
Prior Publication US 2022/0025507 A1, Jan. 27, 2022
Int. Cl. C23C 14/04 (2006.01)
CPC C23C 14/042 (2013.01) 6 Claims
OG exemplary drawing
 
1. A method for manufacturing a mask, the method comprising:
providing, on a stage, a mask frame in which a plurality of cell openings is defined;
providing each of the cell openings with a cell mask material in which a second area and a plurality of first areas are defined, the second area being disposed around each of the first areas;
emitting a laser beam to the second area to harden the second area; and
removing the first areas, thereby forming a plurality of cell masks disposed in the cell openings, respectively,
wherein each of the cell masks of the plurality of cell masks includes a plurality of deposition holes defined by the removing the first areas,
the plurality of deposition holes for each cell mask of the plurality of cell masks are arranged in a first direction and a second direction orthogonal to the first direction, and each of the deposition holes is spaced apart from each other in the first direction and the second direction,
wherein the providing of the cell mask material comprises:
providing the cell openings with a first cell mask material; and
providing, on the first cell mask material, a second cell mask material which comprises a material different from the first cell mask material, and
wherein a second cell mask layer including the second cell mask material is disposed on a first cell mask layer including the first cell mask material.