CPC C08G 18/8116 (2013.01) [B24B 37/24 (2013.01); C08F 2/48 (2013.01); C08G 18/10 (2013.01); C08G 18/6725 (2013.01); C08K 3/04 (2013.01)] | 18 Claims |
1. A UV-curable resin for forming a chemical-mechanical polishing pad comprising:
(a) an acrylate blocked isocyanate component, wherein the acrylate blocked isocyanate component comprises an acrylate blocking agent and an isocyanate terminated urethane prepolymer, wherein the acrylate blocking agents are selected from 2-hydroxyethyl acrylate (HEA), 2-hydroxyethyl methacrylate (HEMA), 2-(tert-butylamino) ethyl methacrylate (TBEMA), and 3-(acryloyloxy)-2-hydroxypropyl methacrylate (AHPMA), wherein the acrylate blocking agent and the isocyanate terminated urethane prepolymer form a capped prepolymer, and wherein there is a ratio of particular capped prepolymers in the acrylate blocked isocyanate component;
(b) one or more acrylate monomers; and
(c) a photoinitiator.
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