CPC C07F 11/00 (2013.01) [H01L 21/02192 (2013.01); H01L 21/32051 (2013.01)] | 10 Claims |
1. A process for preparing compounds of the Formula (I)
wherein M is chosen from tungsten and chromium, X is chosen from fluoro, chloro, bromo, and iodo, and each L1 and L2 are the same or different and constitute:
(i) a monodentate hydrocarbyl ligand coordinated with M, or
(ii) are taken together to form a bidentate hydrocarbyl ligand coordinated with M;
which comprises:
(A) contacting a compound of the formula
with (a) water containing about 0.1% (w/w) to about 48% (w/w) of a compound of the formula HX, and (b) a compound of the formula L1 and/or L2; followed by
(B) extraction of the compound of Formula(I) with a non-coordinating, water immiscible solvent, and isolation of the compound of Formula (I) as a solid or liquid.
|