US 11,807,653 B2
Group VI precursor compounds
David M. Ermert, Danbury, CT (US); Thomas H. Baum, New Fairfield, CT (US); and Robert Wright, Jr., Newtown, CT (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on May 4, 2022, as Appl. No. 17/736,855.
Application 17/736,855 is a continuation of application No. 16/803,547, filed on Feb. 27, 2020, granted, now 11,352,383.
Claims priority of provisional application 62/811,229, filed on Feb. 27, 2019.
Prior Publication US 2022/0259236 A1, Aug. 18, 2022
Int. Cl. C07F 11/00 (2006.01); H01L 21/3205 (2006.01); H01L 21/02 (2006.01)
CPC C07F 11/00 (2013.01) [H01L 21/02192 (2013.01); H01L 21/32051 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A process for preparing compounds of the Formula (I)

OG Complex Work Unit Chemistry
wherein M is chosen from tungsten and chromium, X is chosen from fluoro, chloro, bromo, and iodo, and each L1 and L2 are the same or different and constitute:
(i) a monodentate hydrocarbyl ligand coordinated with M, or
(ii) are taken together to form a bidentate hydrocarbyl ligand coordinated with M;
which comprises:
(A) contacting a compound of the formula

OG Complex Work Unit Chemistry
with (a) water containing about 0.1% (w/w) to about 48% (w/w) of a compound of the formula HX, and (b) a compound of the formula L1 and/or L2; followed by
(B) extraction of the compound of Formula(I) with a non-coordinating, water immiscible solvent, and isolation of the compound of Formula (I) as a solid or liquid.