US 11,807,571 B2
Silicon and silica nanostructures and method of making silicon and silica nanostructures
Albert Carrilero, Cardedeu (ES); Prantik Mazumder, Ithaca, NY (US); and Valerio Pruneri, Castelldefels (ES)
Assigned to Corning Incorporated, Corning, NY (US); and ICFO, Barcelona (ES)
Filed by CORNING INCORPORATED, Corning, NY (US); and ICFO, Barcelona (ES)
Filed on Dec. 8, 2021, as Appl. No. 17/545,493.
Application 17/545,493 is a division of application No. 16/891,606, filed on Jun. 3, 2020, granted, now 11,225,434.
Application 16/891,606 is a continuation of application No. 14/750,047, filed on Jun. 25, 2015, abandoned.
Claims priority of provisional application 62/020,027, filed on Jul. 2, 2014.
Prior Publication US 2022/0098094 A1, Mar. 31, 2022
Int. Cl. C30B 29/06 (2006.01); C03C 15/00 (2006.01); C30B 29/60 (2006.01); C30B 29/18 (2006.01); C30B 11/12 (2006.01); C01B 33/12 (2006.01)
CPC C03C 15/00 (2013.01) [C01B 33/12 (2013.01); C30B 11/12 (2013.01); C30B 29/06 (2013.01); C30B 29/18 (2013.01); C30B 29/60 (2013.01); C30B 29/602 (2013.01); C01P 2004/13 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A composition comprising:
a plurality of silicon nanostructures; and
a silica-containing glass substrate, the silica-containing glass substrate comprising a plurality of nanopillars etched into a surface of the silica-containing glass substrate, the plurality of nanopillars comprising different depths in the silica-containing glass substrate;
wherein the plurality of silicon nanostructures extend from the plurality of nanopillars of the silica-containing glass substrate; and
wherein the plurality of silicon nanostructures comprise one or more nanotubes.