CPC B81C 1/00158 (2013.01) [B81B 3/0021 (2013.01); B81B 7/0029 (2013.01); B81C 1/0023 (2013.01); B81C 1/00325 (2013.01); B81C 1/00357 (2013.01); B81C 1/00476 (2013.01); B81C 1/00539 (2013.01); B81C 1/00825 (2013.01); B81C 3/001 (2013.01); B81B 7/0006 (2013.01); B81B 7/0061 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2207/012 (2013.01); B81B 2207/115 (2013.01); H01L 23/053 (2013.01); H01L 24/48 (2013.01); H01L 2224/48195 (2013.01)] | 20 Claims |
1. A method for forming a microelectromechanical systems (MEMS) device, the method comprising:
forming a filter stack over a carrier substrate, wherein the filter stack comprises a particle filter layer having a particle filter;
forming a support structure layer over the filter stack;
performing a patterning process on the support structure layer to define a support structure in the support structure layer such that the support structure has one or more segments; and
bonding the support structure to a MEMS structure, wherein the MEMS structure comprises a movable element.
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