US 11,807,518 B1 | ||
Multi-die integrated circuit package | ||
Renata M. Berger, Palo Alto, CA (US); Ginel C. Hill, Sunnyvale, CA (US); Paul M. Hagelin, Saratoga, CA (US); Charles I. Grosjean, Los Gatos, CA (US); Aaron Partridge, Cupertino, CA (US); Joseph C. Doll, Mountain View, CA (US); and Markus Lutz, Mountain View, CA (US) | ||
Assigned to SiTime Corporation, Santa Clara, CA (US) | ||
Filed by SiTime Corporation, Santa Clara, CA (US) | ||
Filed on Jun. 19, 2017, as Appl. No. 15/627,049. | ||
Application 15/627,049 is a division of application No. 13/759,013, filed on Feb. 4, 2013, granted, now 9,695,036, issued on Jul. 4, 2017. | ||
Claims priority of provisional application 61/617,230, filed on Mar. 29, 2012. | ||
Claims priority of provisional application 61/594,357, filed on Feb. 2, 2012. | ||
Int. Cl. B81B 3/00 (2006.01); H03H 9/02 (2006.01); H03H 9/24 (2006.01) |
CPC B81B 3/0024 (2013.01) [H03H 9/02448 (2013.01); H03H 9/2405 (2013.01)] | 23 Claims |
1. A multi-die package comprising:
an integrated circuit die having a first surface; electrically conductive pillars extending perpendicularly from the first surface of the integrated circuit die to a first exterior surface of the multi-die package to enforce a structural offset of the integrated circuit die from the first exterior surface; a microelectromechanical system (MEMS) die mounted to the integrated circuit die; at least one metallic structure electrically-coupling the MEMS die and the integrated circuit die; and encapsulation material disposed between and in contact with the electrically conductive pillars and encapsulating the MEMS die; wherein the first integrated circuit die further comprises circuitry to sense a temperature of the MEMS die and to adjust an electrical output of the MEMS die in dependence on sensed temperature; wherein the first surface and the MEMS die are mounted in a manner directly coupled by a thermally-conductive material, so as to place the circuitry to sense the temperature and a MEMS structure with a movable element in thermal communication with one another; and wherein the MEMS die comprises a crystal silicon resonator having a first longitudinal beam and a second longitudinal beam which are structurally interconnected, the first longitudinal beam being non-co-axial with the second longitudinal beam. |