US 11,807,518 B1
Multi-die integrated circuit package
Renata M. Berger, Palo Alto, CA (US); Ginel C. Hill, Sunnyvale, CA (US); Paul M. Hagelin, Saratoga, CA (US); Charles I. Grosjean, Los Gatos, CA (US); Aaron Partridge, Cupertino, CA (US); Joseph C. Doll, Mountain View, CA (US); and Markus Lutz, Mountain View, CA (US)
Assigned to SiTime Corporation, Santa Clara, CA (US)
Filed by SiTime Corporation, Santa Clara, CA (US)
Filed on Jun. 19, 2017, as Appl. No. 15/627,049.
Application 15/627,049 is a division of application No. 13/759,013, filed on Feb. 4, 2013, granted, now 9,695,036, issued on Jul. 4, 2017.
Claims priority of provisional application 61/617,230, filed on Mar. 29, 2012.
Claims priority of provisional application 61/594,357, filed on Feb. 2, 2012.
Int. Cl. B81B 3/00 (2006.01); H03H 9/02 (2006.01); H03H 9/24 (2006.01)
CPC B81B 3/0024 (2013.01) [H03H 9/02448 (2013.01); H03H 9/2405 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A multi-die package comprising:
an integrated circuit die having a first surface;
electrically conductive pillars extending perpendicularly from the first surface of the integrated circuit die to a first exterior surface of the multi-die package to enforce a structural offset of the integrated circuit die from the first exterior surface;
a microelectromechanical system (MEMS) die mounted to the integrated circuit die;
at least one metallic structure electrically-coupling the MEMS die and the integrated circuit die; and
encapsulation material disposed between and in contact with the electrically conductive pillars and encapsulating the MEMS die;
wherein the first integrated circuit die further comprises circuitry to sense a temperature of the MEMS die and to adjust an electrical output of the MEMS die in dependence on sensed temperature;
wherein the first surface and the MEMS die are mounted in a manner directly coupled by a thermally-conductive material, so as to place the circuitry to sense the temperature and a MEMS structure with a movable element in thermal communication with one another; and
wherein the MEMS die comprises a crystal silicon resonator having a first longitudinal beam and a second longitudinal beam which are structurally interconnected, the first longitudinal beam being non-co-axial with the second longitudinal beam.