US 11,806,836 B2
Calcium carbonate slurry
Robert Yang, San Diego, CA (US); Samantha K. Brittelle, San Diego, CA (US); You-Jung Cheng, San Diego, CA (US); Scott William Bailey, San Diego, CA (US); and James M. Tsay, San Diego, CA (US)
Assigned to Illumina, Inc., San Diego, CA (US)
Filed by Illumina, Inc., San Diego, CA (US)
Filed on Dec. 6, 2021, as Appl. No. 17/543,642.
Application 17/543,642 is a division of application No. 16/488,140, granted, now 11,214,712, previously published as PCT/US2018/019019, filed on Feb. 21, 2018.
Claims priority of provisional application 62/463,533, filed on Feb. 24, 2017.
Prior Publication US 2022/0089910 A1, Mar. 24, 2022
Int. Cl. B24C 1/08 (2006.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); C09G 1/00 (2006.01); C09G 1/04 (2006.01); C09G 1/06 (2006.01); C09K 13/06 (2006.01); B24B 1/00 (2006.01); B24B 37/04 (2012.01); H01L 21/321 (2006.01); H01L 21/306 (2006.01)
CPC B24C 1/08 (2013.01) [B24B 1/00 (2013.01); B24B 37/044 (2013.01); C09G 1/00 (2013.01); C09G 1/02 (2013.01); C09G 1/04 (2013.01); C09G 1/06 (2013.01); C09K 3/1409 (2013.01); C09K 3/1454 (2013.01); C09K 3/1463 (2013.01); C09K 13/06 (2013.01); H01L 21/30625 (2013.01); H01L 21/3212 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method, comprising:
polishing a polyacrylamide hydrogel from a portion of a surface of a substrate with a calcium carbonate slurry without substantially scratching the surface of the substrate, wherein the calcium carbonate slurry comprises a dispersant, a surfactant, and a plurality of calcium carbonate particles suspended in a solution, wherein the dispersant includes sodium polyacrylate, sodium n-silicate, sodium tetrapyrophosphate, sodium hexametaphosphate, sodium polyalluminate, sodium tetraborate, sodium triphosphate, sodium citrate, or combinations thereof, and wherein the surfactant includes sodium dodecyl sulfate (SDS), polysorbate, octylphenol ethoxylate, or combinations thereof.