CPC B24C 1/08 (2013.01) [B24B 1/00 (2013.01); B24B 37/044 (2013.01); C09G 1/00 (2013.01); C09G 1/02 (2013.01); C09G 1/04 (2013.01); C09G 1/06 (2013.01); C09K 3/1409 (2013.01); C09K 3/1454 (2013.01); C09K 3/1463 (2013.01); C09K 13/06 (2013.01); H01L 21/30625 (2013.01); H01L 21/3212 (2013.01)] | 9 Claims |
1. A method, comprising:
polishing a polyacrylamide hydrogel from a portion of a surface of a substrate with a calcium carbonate slurry without substantially scratching the surface of the substrate, wherein the calcium carbonate slurry comprises a dispersant, a surfactant, and a plurality of calcium carbonate particles suspended in a solution, wherein the dispersant includes sodium polyacrylate, sodium n-silicate, sodium tetrapyrophosphate, sodium hexametaphosphate, sodium polyalluminate, sodium tetraborate, sodium triphosphate, sodium citrate, or combinations thereof, and wherein the surfactant includes sodium dodecyl sulfate (SDS), polysorbate, octylphenol ethoxylate, or combinations thereof.
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