CPC B06B 1/0292 (2013.01) [B81B 3/0021 (2013.01); B81C 1/00158 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/04 (2013.01); B81B 2207/015 (2013.01); B81B 2207/07 (2013.01); B81C 2201/013 (2013.01); B81C 2201/0125 (2013.01); B81C 2203/036 (2013.01); B81C 2203/0735 (2013.01)] | 5 Claims |
1. An ultrasound transducer device, comprising:
an electrode;
a membrane separated from the electrode by a cavity between the membrane and the electrode;
a patterned membrane support layer disposed between the electrode and the membrane, wherein
a pattern of the patterned membrane support layer defines a size and shape of the cavity, and
the patterned membrane support layer comprises an insulating material, and
vias that electrically connect the electrode to a substrate disposed on an opposite side of the electrode from a side facing the membrane, wherein
the vias are disposed in the ultrasound transducer device such that greater than 50% of the vias overlap with the cavity in a plan view.
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