US 10,462,899 B2
Ceramic substrate and electronic device
Isamu Kirikihira, Kirishima (JP)
Assigned to KYOCERA CORPORATION, Kyoto-Shi, Kyoto (JP)
Filed by KYOCERA Corporation, Kyoto-shi, Kyoto (JP)
Filed on Jan. 29, 2018, as Appl. No. 15/882,063.
Claims priority of application No. 2017-085516 (JP), filed on Apr. 24, 2017.
Prior Publication US 2018/0310402 A1, Oct. 25, 2018
Int. Cl. C04B 35/587 (2006.01); H05K 1/03 (2006.01); C04B 35/14 (2006.01); H01L 23/15 (2006.01); C04B 35/584 (2006.01); H01L 23/373 (2006.01)
CPC H05K 1/0306 (2013.01) [C04B 35/14 (2013.01); C04B 35/584 (2013.01); H01L 23/15 (2013.01); H01L 23/3731 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/85 (2013.01); C04B 2237/32 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48247 (2013.01); H01L 2924/181 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A ceramic substrate, comprising:
a silicon nitride crystal phase containing a plurality of silicon nitride crystals, and grain boundaries between the silicon nitride crystals; and
a silicate phase containing magnesium silicate crystals and rare earth silicate crystals, respective maximum particle sizes of the magnesium silicate crystals and the rare earth silicate crystals being smaller than that of the silicon nitride crystals, the silicate phase being positioned in the grain boundaries,
wherein the rare earth silicate crystals contain at least one of erbium silicate crystals and yttrium silicate crystals and the at least one of erbium silicate crystals and yttrium silicate crystals have minimum particle sizes that are smaller than that of the magnesium silicate crystals.