US 10,462,850 B2
Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater
Satoshi Hirano, Kanagawa (JP); Toshihiro Tachikawa, Kanagawa (JP); Junichi Miyahara, Kanagawa (JP); and Toshihiko Hanamachi, Kanagawa (JP)
Assigned to NHK Spring Co., Ltd., Yokohama-shi (JP)
Appl. No. 13/879,882
Filed by Satoshi Hirano, Kanagawa (JP); Toshihiro Tachikawa, Kanagawa (JP); Junichi Miyahara, Kanagawa (JP); and Toshihiko Hanamachi, Kanagawa (JP)
PCT Filed Oct. 24, 2011, PCT No. PCT/JP2011/074458
§ 371(c)(1), (2), (4) Date Apr. 17, 2013,
PCT Pub. No. WO2012/057091, PCT Pub. Date May 3, 2012.
Claims priority of application No. 2010-244498 (JP), filed on Oct. 29, 2010.
Prior Publication US 2013/0200067 A1, Aug. 8, 2013
Int. Cl. H05B 3/26 (2006.01); C04B 35/645 (2006.01); C04B 37/02 (2006.01); H05B 3/28 (2006.01); H05B 3/74 (2006.01); H05B 3/18 (2006.01)
CPC H05B 3/265 (2013.01) [C04B 35/645 (2013.01); C04B 37/025 (2013.01); C04B 37/026 (2013.01); H05B 3/18 (2013.01); H05B 3/283 (2013.01); H05B 3/74 (2013.01); C04B 2237/083 (2013.01); C04B 2237/122 (2013.01); C04B 2237/343 (2013.01); C04B 2237/366 (2013.01); C04B 2237/368 (2013.01); C04B 2237/40 (2013.01); C04B 2237/60 (2013.01); C04B 2237/708 (2013.01); C04B 2237/72 (2013.01); C04B 2237/84 (2013.01); H05B 2203/017 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method of manufacturing a ceramic sintered body, comprising:
a film forming step of forming, on a surface of a heat-resistant metal material which is molybdenum or a molybdenum alloy, a metal coating film made of titanium, tantalum, or zirconium which is a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material;
a molding step of disposing the heat-resistant metal material provided with the coating film in the film forming step at a predetermined position in powder that serves as a starting material of a ceramic base, and molding a ceramic green body by press-molding the powder; and
a sintering step of generating a ceramic sintered body by sintering the ceramic green body molded in the molding step;
wherein the metal coating film suppresses a carbonization reaction of the heat-resistant metal material during the sintering.