US 11,793,083 B2
Vibration sensor and piezoelectric element
Shinya Bitou, Osaka (JP); Tetsuhiro Kodani, Osaka (JP); Saori Sakami, Osaka (JP); Takashi Kanemura, Osaka (JP); Tsuyoshi Sekitani, Osaka (JP); Takafumi Uemura, Osaka (JP); and Shusuke Yoshimoto, Osaka (JP)
Assigned to DAIKIN INDUSTRIES, LTD., Osaka (JP); and OSAKA UNIVERSITY, Osaka (JP)
Appl. No. 16/628,765
Filed by DAIKIN INDUSTRIES, LTD., Osaka (JP); and OSAKA UNIVERSITY, Osaka (JP)
PCT Filed Jul. 5, 2018, PCT No. PCT/JP2018/025589
§ 371(c)(1), (2) Date Jan. 6, 2020,
PCT Pub. No. WO2019/009374, PCT Pub. Date Jan. 10, 2019.
Claims priority of application No. 2017-133486 (JP), filed on Jul. 7, 2017.
Prior Publication US 2020/0144481 A1, May 7, 2020
Int. Cl. H01L 41/193 (2006.01); G01P 15/09 (2006.01); G01H 11/08 (2006.01); H01L 41/113 (2006.01); H10N 30/857 (2023.01); H10N 30/30 (2023.01)
CPC H10N 30/857 (2023.02) [G01H 11/08 (2013.01); G01P 15/0922 (2013.01); H10N 30/302 (2023.02)] 15 Claims
OG exemplary drawing
 
1. A vibration sensor comprising:
a support;
an organic piezoelectric material deformably disposed in or on the support; and
an electrode for extracting an electrical signal generated by deformation of the organic piezoelectric material, the electrode being formed on the organic piezoelectric material,
the organic piezoelectric material comprising a copolymer of vinylidene fluoride and one or more monomers copolymerizable with vinylidene fluoride, comprising no inorganic ceramic piezoelectric materials, and having an inner haze value of 3% or more,
wherein the vibration sensor is fixed to an object to be measured in order to detect the vibration of the object, and wherein the object has a solid structure.