US 11,793,082 B2
Piezoelectric body film, piezoelectric element, and method for manufacturing piezoelectric element
Naoki Murakami, Kanagawa (JP); and Daigo Sawaki, Kanagawa (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Sep. 4, 2019, as Appl. No. 16/560,325.
Application 16/560,325 is a continuation of application No. PCT/JP2018/008542, filed on Mar. 6, 2018.
Claims priority of application No. 2017-070558 (JP), filed on Mar. 31, 2017.
Prior Publication US 2020/0006622 A1, Jan. 2, 2020
Int. Cl. H01L 41/187 (2006.01); H10N 30/853 (2023.01); C01G 33/00 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); H10N 30/076 (2023.01)
CPC H10N 30/8554 (2023.02) [C01G 33/006 (2013.01); C23C 14/08 (2013.01); C23C 14/34 (2013.01); H10N 30/076 (2023.02); C01P 2002/34 (2013.01); C01P 2002/50 (2013.01); C01P 2002/74 (2013.01); C01P 2006/40 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A piezoelectric body film comprising:
a perovskite-type oxide represented by Formula (1),
wherein a content q of Nb with respect to the number of all atoms in the perovskite-type oxide and
a ratio r of a diffraction peak intensity from a (200) plane to a diffraction peak intensity from a (100) plane of the perovskite-type oxide, which is measured using an X-ray diffraction method, satisfy Expression (2),
A1+δ[(ZryTi1-y)1-xNbx]Ox  Formula (1)
0.35≤r/q<0.58  Expression (2)
in this case, in Formula (1), A represents an A site element containing Pb, x and y each independently represent a numerical value of more than 0 and less than 1, standard values of δ and z each are 0 and 3, but these values may deviate from the standard values as long as the perovskite-type oxide has a perovskite structure, and, in Expression (2), a unit of q is atm %.