US 11,791,802 B1
Clock generator with dual-path temperature compensation
Saleh Heidary Shalmany, Delft (NL); Kamran Souri, The Hague (NL); Sassan Tabatabaei, Sunnyvale, CA (US); and Ugur Sönmez, The Hague (NL)
Assigned to SiTime Corporation, Santa Clara, CA (US)
Filed by SiTime Corporation, Santa Clara, CA (US)
Filed on Oct. 26, 2022, as Appl. No. 17/973,851.
Application 17/544,171 is a division of application No. 17/199,314, filed on Mar. 11, 2021, granted, now 11,228,302, issued on Jan. 18, 2022.
Application 17/199,314 is a division of application No. 16/782,634, filed on Feb. 5, 2020, granted, now 10,979,031, issued on Apr. 13, 2021.
Application 16/782,634 is a division of application No. 16/004,283, filed on Jun. 8, 2018, granted, now 10,594,301, issued on Mar. 17, 2020.
Application 17/973,851 is a continuation of application No. 17/544,171, filed on Dec. 7, 2021, granted, now 11,528,014.
Claims priority of provisional application 62/517,396, filed on Jun. 9, 2017.
Int. Cl. H03K 3/011 (2006.01); G06F 1/04 (2006.01)
CPC H03K 3/011 (2013.01) [G06F 1/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A timing signal generator comprising:
a microelectromechanical systems (MEMS) resonator, wherein the MEMS resonator is to vibrate at a resonant frequency having a temperature dependent variation;
temperature sensing circuitry, including at least one temperature sensor, the temperature sensing circuitry to generate each of an analog temperature-dependent signal and a digital temperature-dependent signal;
circuitry to control a frequency of operation of the MEMS resonator as a function of sensed temperature using a first one of the analog temperature-dependent signal and the digital temperature-dependent signal; and
locked-loop circuitry to receive a signal representing a resonance frequency of the MEMS resonator and to control generation a timing signal therefrom, for output by the timing signal generator, using a second one of the analog temperature-dependent signal and the digital temperature-dependent signal.