CPC H01L 28/56 (2013.01) [H01L 28/65 (2013.01)] | 8 Claims |
1. A dielectric having a three-dimensional nanoscale shape, the dielectric comprising:
an oxide including a nanoscale three-dimensional (3D) perovskite-type crystal structure, the oxide represented by RAMBOC where R is a divalent element, M is a pentavalent element, 1.3<B/A<1.7, and 9.0≤C<10.0,
wherein the dielectric is electrically neutral, and
wherein the oxide is electrically neutral.
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