CPC H01L 28/56 (2013.01) [H01L 23/66 (2013.01); H01L 28/75 (2013.01); H01L 2223/6661 (2013.01)] | 15 Claims |
1. A capacitor comprising:
a first electrode layer;
a dielectric layer on the first electrode layer; and
a second electrode layer on the dielectric layer,
wherein the dielectric layer comprises a plurality of unit dielectric layers sequentially stacked and configured to be in contact with each other, a first unit dielectric layer of the plurality of unit dielectric layers comprises two sub-dielectric layers, and a second unit dielectric layer of the plurality of unit dielectric layers comprises two sub-dielectric layers,
wherein the two sub-dielectric layers each comprise comprising a first sub-dielectric layer and a second sub-dielectric layer, the first sub-dielectric layer and the second sub-dielectric layer having different dielectric constants and conductivities, and are connected in series,
wherein the capacitance of the dielectric layer converges to the capacitance of the unit dielectric layer as a result of a conductivity difference between the first and second sub-dielectric layers, and
wherein thicknesses of the plurality of unit dielectric layers are the same with each other.
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