US 11,791,139 B2
Substrate support
Shin Yamaguchi, Miyagi (JP); Yasuharu Sasaki, Miyagi (JP); and Koei Ito, Miyagi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Mar. 2, 2022, as Appl. No. 17/653,165.
Claims priority of application No. 2021-036683 (JP), filed on Mar. 8, 2021.
Prior Publication US 2022/0285138 A1, Sep. 8, 2022
Int. Cl. H01J 37/32 (2006.01); H01L 21/683 (2006.01)
CPC H01J 37/32724 (2013.01) [H01J 37/32541 (2013.01); H01J 37/32697 (2013.01); H01L 21/6833 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A substrate support comprising:
a base;
a substrate support layer disposed on the base, the substrate support layer being formed of an insulating material; and
an electrostatic internal electrode layer disposed in the substrate support layer, the electrostatic internal electrode layer including a body portion and a plurality of protruding portions, the body portion having a circular shape in a plan view, and the plurality of protruding portions radially protruding from the body portion.