CPC H01J 37/32724 (2013.01) [H01J 37/32541 (2013.01); H01J 37/32697 (2013.01); H01L 21/6833 (2013.01)] | 18 Claims |
1. A substrate support comprising:
a base;
a substrate support layer disposed on the base, the substrate support layer being formed of an insulating material; and
an electrostatic internal electrode layer disposed in the substrate support layer, the electrostatic internal electrode layer including a body portion and a plurality of protruding portions, the body portion having a circular shape in a plan view, and the plurality of protruding portions radially protruding from the body portion.
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