CPC H01J 37/28 (2013.01) [H01J 37/153 (2013.01); H01J 37/222 (2013.01); H01J 2237/2817 (2013.01)] | 28 Claims |
1. A correction factor calculation method in an electron beam observation device for correcting images among a plurality of the electron beam observation devices each of which generates an image by irradiating an electron beam over a specimen, the method comprising the steps of:
allowing a first electron beam observation device to generate a first image data by irradiating a first electron beam over a first pattern and a second pattern differing from the first pattern in a shape or a size, in which the first pattern and the second pattern are included in a specimen, or the first pattern is included in a first specimen and the second pattern is included in a second specimen;
allowing a second electron beam observation device to generate a second image data by irradiating a second electron beam over the first and second patterns; and
allowing one of the first and second electron beam observation devices to calculate a correction factor at a frequency selectively extracted from first and second frequency characteristics calculated based on the first and second image data.
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