US 11,789,425 B2
Transport control apparatus and transport control system including the same
Su Jong Yu, Chungcheongnam-do (KR)
Assigned to Semes Co., Ltd., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Jun. 30, 2020, as Appl. No. 16/916,341.
Claims priority of application No. 10-2019-0081606 (KR), filed on Jul. 5, 2019.
Prior Publication US 2021/0003988 A1, Jan. 7, 2021
Int. Cl. G05B 19/402 (2006.01); H01L 21/677 (2006.01); B65G 1/04 (2006.01); H01L 21/67 (2006.01); G05B 19/418 (2006.01)
CPC G05B 19/402 (2013.01) [B65G 1/0457 (2013.01); G05B 19/4189 (2013.01); H01L 21/6773 (2013.01); H01L 21/67276 (2013.01); H01L 21/67733 (2013.01); B65G 2201/0297 (2013.01); G05B 2219/45031 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A transport control system comprising:
a plurality of transports, each of the plurality of transports transporting a carrier with a wafer loaded thereon; and
a transport control apparatus controlling the plurality of transports and determining one of the plurality of transports as a target transport to which multiple jobs are to be assigned,
wherein the transport control apparatus determines one of the plurality of transports as the target transport based on a first element, which is the availability of linkage transporting, and a second element, which is the likelihood of transport congestion, and
wherein if the transport control apparatus determines one of the plurality of transports as the target transport based on the first element, the transport control apparatus determines the availability of linkage transporting based on whether one transport is positioned on a moving path of another transport or not, and whether the one transport can be moved or not.