US 11,789,367 B2
Facet mirror for an illumination optical unit of a projection exposure apparatus
Willi Anderl, Huettlingen (DE); Christian Körner, Munich (DE); Hubert Holderer, Oberkochen (DE); Markus Holz, Aalen (DE); Manuel Stompe, Planegg (DE); and Stefan Seitz, Aalen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Mar. 15, 2022, as Appl. No. 17/695,402.
Application 17/695,402 is a continuation of application No. PCT/EP2020/076137, filed on Sep. 18, 2020.
Claims priority of application No. 102019214269.9 (DE), filed on Sep. 19, 2019.
Prior Publication US 2022/0206398 A1, Jun. 30, 2022
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70075 (2013.01) [G03F 7/702 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A facet mirror, comprising:
a plurality of displaceable individual facets, each facet comprising:
a facet main body comprising at least one member selected from the group consisting of stop surfaces and stop elements; and
a reflection surface supported by the main body,
wherein:
the individual facets comprise a first facet and a second facet;
relative to an edge of the reflection surface of the first facet, the at least one member of the main body of the first facet is offset outwardly in a direction perpendicular to a tilting axis of the first facet;
relative to an edge of the reflection surface of the second facet, the at least one member of the main body of the second facet is offset outwardly in a direction perpendicular to a tilting axis of the second facet;
in a first position of the facet mirror, the first and second facets do not contact each other; and
in a second position of the facet mirror, the at least one member of the first facet contacts the main body of the second facet without the edge of the reflection surface of the first facet contacting the edge of the reflection surface of the second facet.