US 11,789,096 B2
Sensor and inspection device
Akira Kikitsu, Yokohama Kanagawa (JP); Yoshihiro Higashi, Komatsu Ishikawa (JP); and Satoshi Shirotori, Yokohama Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Jul. 27, 2022, as Appl. No. 17/875,044.
Claims priority of application No. 2022-024482 (JP), filed on Feb. 21, 2022.
Prior Publication US 2023/0266410 A1, Aug. 24, 2023
Int. Cl. G01R 33/09 (2006.01); H01F 7/02 (2006.01)
CPC G01R 33/09 (2013.01) [H01F 7/02 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a first element, the first element, including:
a first magnetic member;
a second magnetic member, the second magnetic member being separated from the first magnetic member in a first direction from the first magnetic member to the second magnetic member;
an insulating member including a first insulating region, the first insulating region being provided between the first magnetic member and the second magnetic member;
a first wiring including a first connecting region;
a second wiring including a second connecting region;
a first magnetic element including a first magnetic layer and a first opposed magnetic layer, a second direction from the first magnetic layer to the first opposed magnetic layer crossing the first direction, a length of the first magnetic element along the first direction being longer than a length of the first magnetic element along a third direction crossing a plane including the first direction and the second direction, the first magnetic element including a first partial region, a second partial region, a third partial region, a fourth partial region, and a fifth partial region, the first partial region being between the fourth partial region and the fifth partial region in the first direction, the second partial region being between the fourth partial region and the first partial region in the first direction, the third partial region being between the first partial region and the fifth partial region in the first direction, a direction from the first partial region to the first insulating region being along the second direction, a direction from the second partial region to the first connecting region being along the second direction, the second partial region being electrically connected to the first connecting region, a direction from the third partial region to the second connecting region being along the second direction, the third partial region being electrically connected to the second connecting region, a direction from the fourth partial region to at least a part of the first magnetic member being along the second direction, a direction from the fifth partial region to at least a part of the second magnetic member being along the second direction; and
a first conductive member extending in the first direction, a direction from the first conductive member to the first magnetic element being along the second direction.