CPC G01Q 60/38 (2013.01) [G01Q 10/045 (2013.01); G01Q 20/02 (2013.01); G01Q 70/06 (2013.01)] | 8 Claims |
1. An integrated dual-probe for atomic force microscope, comprising a hinge structure a first cantilever beam and the second cantilever beam extending from the hinge structure,
wherein each of the first and the second cantilever beams has one end affixed to the hinge structure, a first needle tip affixed to the free end of the first cantilever beam and the second needle tip affixed to the free end of the second cantilever beam, and
a dual-probe clamp,
wherein the duel-probe clamp comprises a fixture, a probe base, a probe clamp fixing base, a first piezoelectric ceramics and a first controller, and a second piezoelectric ceramic and a second controller, the probe base being connected with the probe clamp fixing base, and the hinge structure being affixed to the probe base through the fixture, and,
during operation, the first controller controls the first piezoelectric ceramics to cause movement of the first cantilever arm, and the second controller controls the second piezoelectric ceramics to cause movement of the second cantilever arm.
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