US 11,789,037 B2
Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope
Lianqing Liu, Liaoning (CN); Jialin Shi, Liaoning (CN); and Peng Yu, Liaoning (CN)
Assigned to SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES, Liaoning (CN)
Appl. No. 17/757,343
Filed by SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES, Liaoning (CN)
PCT Filed May 8, 2021, PCT No. PCT/CN2021/092279
§ 371(c)(1), (2) Date Jun. 14, 2022,
PCT Pub. No. WO2022/057277, PCT Pub. Date Mar. 24, 2022.
Claims priority of application No. 202010973514.0 (CN), filed on Sep. 16, 2020.
Prior Publication US 2023/0019239 A1, Jan. 19, 2023
Int. Cl. G01Q 60/24 (2010.01); G01Q 10/04 (2010.01); G01Q 20/02 (2010.01); G01Q 60/38 (2010.01); G01Q 70/06 (2010.01)
CPC G01Q 60/38 (2013.01) [G01Q 10/045 (2013.01); G01Q 20/02 (2013.01); G01Q 70/06 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An integrated dual-probe for atomic force microscope, comprising a hinge structure a first cantilever beam and the second cantilever beam extending from the hinge structure,
wherein each of the first and the second cantilever beams has one end affixed to the hinge structure, a first needle tip affixed to the free end of the first cantilever beam and the second needle tip affixed to the free end of the second cantilever beam, and
a dual-probe clamp,
wherein the duel-probe clamp comprises a fixture, a probe base, a probe clamp fixing base, a first piezoelectric ceramics and a first controller, and a second piezoelectric ceramic and a second controller, the probe base being connected with the probe clamp fixing base, and the hinge structure being affixed to the probe base through the fixture, and,
during operation, the first controller controls the first piezoelectric ceramics to cause movement of the first cantilever arm, and the second controller controls the second piezoelectric ceramics to cause movement of the second cantilever arm.