CPC G01N 23/223 (2013.01) [G01N 23/2204 (2013.01); G01N 2223/076 (2013.01); G01N 2223/309 (2013.01); G01N 2223/637 (2013.01)] | 11 Claims |
1. An X-ray fluorescence analyzer for analyzing a sample by irradiating a surface of the sample with X-rays and detecting fluorescent X-rays generated from the surface, the X-ray fluorescence analyzer comprising:
a measurement chamber configured to perform an irradiation of the X-rays and a detection of the fluorescent X-rays;
an exhaust configured to exhaust an atmosphere in the measurement chamber;
a processing device configured to analyze the sample according to an analysis condition set by a user; and
a detector configured to detect whether or not the sample is a liquid,
wherein the analysis condition includes an atmospheric condition defining a state of the atmosphere in the measurement chamber, and
wherein when it is detected by the detector that the sample is a liquid, the processing device is configured to prohibit or stop an operation of the exhaust in a case in which the atmospheric condition is set to a vacuum atmosphere.
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