CPC G01L 9/0048 (2013.01) [B81B 3/0021 (2013.01); B81C 1/00182 (2013.01); G01L 9/005 (2013.01); G01L 9/0073 (2013.01); G01L 19/145 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/04 (2013.01); B81C 2201/013 (2013.01); B81C 2201/0105 (2013.01)] | 15 Claims |
1. A micromechanical pressure sensor device, comprising:
a sensor substrate;
a diaphragm system that is anchored in the sensor substrate and that includes a first diaphragm and a second diaphragm situated spaced apart therefrom, which are circumferentially connected to one another in an edge area, and enclose a reference pressure in an interior space formed in between the first and second diaphragm; and
a plate-shaped central electrode that is suspended in the interior space and that is situated spaced apart from the first diaphragm and from the second diaphragm and that forms a first capacitor with the first diaphragm and forms a second capacitor with the second diaphragm;
wherein the first diaphragm and the second diaphragm are configured in such a way that they are deformable toward one another when acted on by an external pressure,
wherein the diaphragm system is situated in a cantilever manner.
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