US 11,788,912 B2
Micromechanical pressure sensor device including a diaphragm system and corresponding manufacturing method
Heribert Weber, Nuertingen (DE); and Peter Schmollngruber, Aidlingen (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Appl. No. 16/972,588
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed Jun. 28, 2019, PCT No. PCT/EP2019/067328
§ 371(c)(1), (2) Date Dec. 5, 2020,
PCT Pub. No. WO2020/011559, PCT Pub. Date Jan. 16, 2020.
Claims priority of application No. 102018211330.0 (DE), filed on Jul. 10, 2018.
Prior Publication US 2021/0215559 A1, Jul. 15, 2021
Int. Cl. G01L 9/00 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01L 19/14 (2006.01)
CPC G01L 9/0048 (2013.01) [B81B 3/0021 (2013.01); B81C 1/00182 (2013.01); G01L 9/005 (2013.01); G01L 9/0073 (2013.01); G01L 19/145 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/04 (2013.01); B81C 2201/013 (2013.01); B81C 2201/0105 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A micromechanical pressure sensor device, comprising:
a sensor substrate;
a diaphragm system that is anchored in the sensor substrate and that includes a first diaphragm and a second diaphragm situated spaced apart therefrom, which are circumferentially connected to one another in an edge area, and enclose a reference pressure in an interior space formed in between the first and second diaphragm; and
a plate-shaped central electrode that is suspended in the interior space and that is situated spaced apart from the first diaphragm and from the second diaphragm and that forms a first capacitor with the first diaphragm and forms a second capacitor with the second diaphragm;
wherein the first diaphragm and the second diaphragm are configured in such a way that they are deformable toward one another when acted on by an external pressure,
wherein the diaphragm system is situated in a cantilever manner.