CPC G01B 17/025 (2013.01) [F25D 19/00 (2013.01); G01B 17/02 (2013.01); G01N 29/07 (2013.01); G01N 29/32 (2013.01); G01N 29/326 (2013.01); G01N 2291/0234 (2013.01); G01N 2291/02854 (2013.01); G01N 2291/048 (2013.01); G01N 2291/101 (2013.01); G01N 2291/102 (2013.01)] | 19 Claims |
1. An apparatus for measuring thickness of an object comprising:
a chamber;
a sound wave transmitter transmitting a sound wave in the chamber;
a sound wave receiver receiving the sound wave transmitted from the sound wave transmitter in the chamber;
a supporter disposed between the sound wave transmitter and the sound wave receiver, and supporting the object;
a cooler which cools the chamber at a temperature lower than or equal to about minus 170 degrees Celsius when measuring the thickness of the object; and
a controller connected to the sound wave receiver and receiving a sound wave reception signal from the sound wave receiver, the controller calculating the thickness of the object.
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