| CPC F16K 3/0254 (2013.01) [F16K 3/316 (2013.01); F16K 3/32 (2013.01); F16K 31/122 (2013.01); F16K 51/02 (2013.01)] | 10 Claims |
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1. A vacuum valve comprising:
a valve housing with a first valve opening having an axis and is surrounded by a first valve seat;
a closure unit having a valve rod which protrudes out of the valve housing, a carrier piece connected rigidly to the valve rod outside the valve housing, and a first valve plate supported by the valve rod and arranged within the valve housing, wherein the closure unit is adjustable, starting from an open position, in which the first valve plate releases the first valve opening, in a longitudinal adjusting direction into a middle position, in which the first valve plate covers the first valve opening but is lifted up from the first valve seat, and, starting from the middle position, in a transverse adjusting direction, which lies at a right angle with respect to the longitudinal adjusting direction, into a first closing position, in which the first valve plate bears against the first valve seat;
a transmission unit;
a drive unit with a base body, connected rigidly to the valve housing, and at least one actuator;
at least one longitudinal linear guide, by which the transmission unit is guided displaceably parallel to the longitudinal adjusting direction with respect to the base body of the valve drive, the transmission unit being adjustable by the at least one actuator with respect to the base body in the longitudinal adjusting direction from a starting position via an intermediate position into a first active position;
at least one oblique linear guide, by which the carrier piece is guided displaceably with respect to the transmission unit parallel to an oblique adjusting direction which lies in a plane, defined by the longitudinal adjusting direction and transverse adjusting direction, at an angle with respect to the longitudinal adjusting direction and at an angle with respect to the transverse adjusting direction;
at least one spring which acts between the transmission unit and the carrier piece drives the carrier piece during the adjustment of the transmission unit with respect to the base body from the starting position as far as the intermediate position, an adjustment of the closure unit taking place in the longitudinal adjusting direction from the open position into the middle position;
a stop device which blocks an adjustment of the closure unit in the longitudinal adjusting direction in the middle position of the closure unit, further driving of the carrier piece in the longitudinal adjusting direction being blocked during the further adjustment of the transmission unit with respect to the base body from the intermediate position into the first active position, and an adjustment of the transmission unit with respect to the carrier piece taking place in the oblique adjusting direction with deformation of the spring and therefore an adjustment of the closure unit taking place in the transverse adjusting direction from the middle position into the first closed position;
the valve housing including a second valve opening which is surrounded by a second valve seat and lies opposite the first valve opening;
the closure unit has a second valve plate which is supported by the valve rod and is arranged within the valve housing, the second valve plate releasing the second valve opening in the open position of the closure unit, and the closure unit covering the second valve opening but being lifted up from the second valve seat in the middle position of the closure unit, and the closure unit being adjustable, starting from the middle position, counter to the transverse adjusting direction into a second closed position, in which the second valve plate bears against that the second valve seat, and
a blocking unit configured to be switched over between a blocked state and a release state, wherein in the blocked state, an adjustment of the closure unit which is situated in the middle position is blocked counter to the longitudinal adjusting direction in the direction of the open position, and in the release state, such an adjustment of the closure unit is released, and wherein in the blocked state of the blocking unit in the case of an adjustment of the transmission unit with respect to the base body by way of the at least one actuator counter to the longitudinal adjusting direction from the intermediate position as far as the second active position, an adjustment of the transmission unit with respect to the carrier piece taking place counter to the oblique adjusting direction with deformation of the spring, and therefore an adjustment of the closure unit taking place counter to the transverse adjusting direction from the middle position into the second closed position.
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