CPC C30B 25/186 (2013.01) [C30B 29/403 (2013.01); C30B 33/10 (2013.01); H01L 21/02019 (2013.01); H01L 21/02021 (2013.01); H01L 21/02024 (2013.01)] | 7 Claims |
1. An indium phosphide substrate comprising a main surface for forming an epitaxial crystal layer and a back surface opposite to the main surface,
wherein the back surface has a SORI value of 2.5 μm or less, as measured with the back surface of the indium phosphide substrate facing upward.
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