US 11,788,189 B2
Depositing coatings on and within housings, apparatus, or tools utilizing pressurized cells
Christopher Michael Jones, Katy, TX (US); James M. Price, Cypress, TX (US); and William Joseph Soltmann, The Woodlands, TX (US)
Assigned to Halliburton Energy Services, Inc., Houston, TX (US)
Filed by Halliburton Energy Services, Inc., Houston, TX (US)
Filed on Aug. 27, 2020, as Appl. No. 17/4,724.
Prior Publication US 2022/0064793 A1, Mar. 3, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/455 (2006.01); C23C 16/52 (2006.01); C23C 16/02 (2006.01)
CPC C23C 16/45544 (2013.01) [C23C 16/0209 (2013.01); C23C 16/52 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of coating, with one or more surface coating processes, an interior surface of a housing defining an interior volume, the method comprising:
positioning a coating system and a housing proximate each other,
wherein the coating system comprises: a first closure and a second closure to sealingly engage the housing; one or more first flow lines fluidically coupled to the first closure and one or more second flow lines fluidically coupled to the second closure; one or a plurality of pressurized cells, wherein the one or each of the plurality of pressurized cells comprises pressurized gas comprising one or more reactant gases, wherein the pressurized gas is at a pressure of greater than a pressure within the interior volume of the housing, wherein the one or each of the plurality of pressurized cells is fluidically coupled to a pressurized cell line comprising one of the one or more first flow lines or one of the one or more second flow lines; and a controller in electronic communication with the one or the plurality of pressurized cells, wherein, for the one or each of the plurality of pressurized cells, the controller is configured to control injection of a pulse of the pressurized gas into a flow of inert gas in the pressurized cell line, whereby the pulse of the pressurized gas is introduced into the interior volume, coating the interior surface of the housing with a coating layer;
sealingly engaging the first closure to an inlet of the housing and sealingly engaging the second closure to an outlet of the housing;
introducing one or more pulses of the pressurized gas from the one or each of the plurality of pressurized cells via pulsing of the pressurized gas from the one or the each of the plurality of pressurized cells into an inert gas flow in the pressurized cell line; and
depositing one or more coating layers on all or a portion of the interior surface within the interior volume of the housing by reaction of the one or more reactant gases, wherein the reaction comprises a chemical vapor deposition (CVD) reaction, an atomic layer deposition (ALD) reaction, or both, such that the one or more coating layers respectively comprise an ALD layer, a CVD layer, or both.