US 11,788,187 B2
Depositing coatings on and within housings, apparatus, or tools utilizing counter current flow of reactants
Christopher Michael Jones, Katy, TX (US); James M. Price, Cypress, TX (US); William Joseph Soltmann, The Woodlands, TX (US); and Jian Li, Bellaire, TX (US)
Assigned to Halliburton Energy Services, Inc., Houston, TX (US)
Filed by Halliburton Energy Services, Inc., Houston, TX (US)
Filed on Aug. 27, 2020, as Appl. No. 17/4,707.
Prior Publication US 2022/0062947 A1, Mar. 3, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/04 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/02 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/045 (2013.01) [C23C 16/0209 (2013.01); C23C 16/4412 (2013.01); C23C 16/455 (2013.01); C23C 16/45557 (2013.01); C23C 16/52 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A method of coating, with one or more surface coating processes, an interior surface of a housing defining an interior volume, the method comprising:
positioning a coating system and a housing proximate each other,
wherein the coating system comprises: a first flow line fluidically coupled to a first closure and a second flow line fluidically coupled to a second closure, wherein the first flow line, the second flow line, or both are fluidically connected to an inert gas source; one or a plurality of reactant gas sources, wherein the one or each of the plurality of reactant gas sources comprises a reactant gas and is fluidically coupled to the first flow line, the second flow line or both; and
a controller in electronic communication with the one or the plurality of reactant gas sources and the inert gas source, wherein the controller is configured to control flow of the inert gas from the inert gas source into an enclosed volume, and to control counter current injection of the reactant gas from the one or the plurality of reactant gas sources into the enclosed volume such that introduction of one or more pulses of the reactant gas into the enclosed volume are separated by introduction of the inert gas into the enclosed volume, and one or more coating layers are deposited on all or a portion of the interior surface within the enclosed volume,
sealingly engaging the first closure to a first end of the housing and sealingly engaging the second closure to outlet second end of the housing to form the enclosed volume;
counter currently injecting the reactant gas from the one or the plurality of reactant gas sources into the enclosed volume, from the one or the plurality of reactant gas sources through the enclosed volume in a first direction from the first end to the second end and subsequently from the one or the plurality of reactant gas sources through the enclosed volume in a second direction from the second end to the first end, wherein introduction of one or more pulses of the reactant gas into the enclosed volume are separated by introduction of the inert gas into the enclosed volume; and
depositing the one or more coating layers on all or a portion of the interior surface within the enclosed volume, wherein the one or more coating layers comprise an ALD layer, a CVD layer, or both.