CPC C23C 14/08 (2013.01) [C23C 14/35 (2013.01)] | 17 Claims |
1. A method of growing a stoichiometric crystalline IR-transparent Phase-Change Correlated Transition Metal Oxide (PCMO) optical film of a desired thickness on a substrate, the method comprising:
a. heating the substrate to a temperature at least equal to the temperature of crystallization of a PCMO material to be deposited thereon in an oxygen-free gas environment,
b. depositing the PCMO material onto the substrate while at said temperature at least equal to the temperature of crystallization of the PCMO material;
c. cooling the substrate with the PCMO material deposited thereon to a temperature substantially less than the temperature of crystallization of the PCMO material in an oxygen-free gas environment;
d. heating the substrate previously cooled at step c to a temperature at least equal to the temperature of crystallization of the PCMO material to be deposited thereon in an oxygen-free gas environment,
e. depositing the PCMO material onto previously deposited PCMO material while at said temperature at least equal to the temperature of crystallization of the PCMO material; and
f. repeating steps c, d and e until said desired thickness of the PCMO optical film on the substrate is obtained.
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