CPC C03B 35/161 (2013.01) [B65G 49/06 (2013.01); B65G 49/065 (2013.01); C03B 17/068 (2013.01); C03B 33/0235 (2013.01); C03B 33/091 (2013.01); C03B 35/18 (2013.01); C03B 35/182 (2013.01); C03C 17/06 (2013.01); H01L 21/67718 (2013.01)] | 8 Claims |
1. A method of manufacturing a glass film, the method comprising the steps of:
forming a band-shaped glass film by pulling down a glass ribbon flowing down from a forming trough while sandwiching the glass ribbon from both front and back sides through use of roller pairs arranged in a plurality of stages along an up-and-down direction, the band-shaped glass film having edge portions at both ends in a width direction with thicknesses that are larger than other portions of the band-shaped glass film; and
changing a conveyance direction of the band-shaped glass film conveyed in a vertical direction after the forming to a horizontal direction by conveying the band-shaped glass film along a conveyance path having an arc shape while supporting the band-shaped glass film from a back surface side through use of a conveyor so that a front surface of the band-shaped glass film after having passed through the conveyance path faces upward,
wherein in a conveyance passage of the band-shaped glass film, a first roller, which is to be brought into abutment against only an area of the band-shaped glass film inside the edge portions in the width direction of the band-shaped glass film from a front surface side, is arranged in a section located between a roller pair arranged in a lowermost stage and the conveyor,
wherein the first roller has a rotation axis extending along the width direction of the band-shaped glass film,
wherein at a position where the first roller is arranged, the band-shaped glass film is not supported from the back surface side,
wherein the conveyor is arranged along a curve of the conveyance path,
wherein, when observed from a direction parallel to the width direction of the band-shaped glass film,
curvatures of the front and back surfaces of the band-shaped glass film in the conveyance direction are not exchanged between concave and convex or convex and concave from a start to an end of the changing of the conveyance direction from the vertical direction to the horizontal direction.
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