US 11,787,621 B2
Reticle pod and wear parts thereof
Ming-Chien Chiu, New Taipei (TW); and Jain-Ping Sheng, New Taipei (TW)
Assigned to GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW)
Filed by GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW)
Filed on Jun. 16, 2020, as Appl. No. 16/903,337.
Claims priority of application No. 109109682 (TW), filed on Mar. 23, 2020.
Prior Publication US 2021/0292083 A1, Sep. 23, 2021
Int. Cl. H01L 21/67 (2006.01); B65D 85/48 (2006.01); H01L 21/673 (2006.01); G03F 1/66 (2012.01); G03F 7/00 (2006.01)
CPC B65D 85/48 (2013.01) [G03F 1/66 (2013.01); G03F 7/70741 (2013.01); H01L 21/67359 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A reticle pod, comprising:
a cover;
a box, comprising a vertical accommodation space;
wherein the box has at least one guiding member which matches with the cover;
a plurality of slots, disposed in the vertical accommodation space in pairs;
a wear parts module, configured on at least one of the plurality of slots;
wherein the wear parts module adapted for directly contacting a plurality of reticles, and the wear parts module comprising:
a first wear part, configured on an entrance of the at least one slot; and
a second wear part, configured on the other side of the entrance of the at least one slot;
wherein the first wear part further comprises a first bevel;
wherein the second wear part further comprises a second bevel;
wherein a third bevel is configured on connection between the second wear part and a middle portion of the at least one of the plurality of slots;
wherein the first bevel and the second bevel facilitate loading of the plurality of reticles into the reticle pod.