CPC B65D 85/48 (2013.01) [G03F 1/66 (2013.01); G03F 7/70741 (2013.01); H01L 21/67359 (2013.01)] | 6 Claims |
1. A reticle pod, comprising:
a cover;
a box, comprising a vertical accommodation space;
wherein the box has at least one guiding member which matches with the cover;
a plurality of slots, disposed in the vertical accommodation space in pairs;
a wear parts module, configured on at least one of the plurality of slots;
wherein the wear parts module adapted for directly contacting a plurality of reticles, and the wear parts module comprising:
a first wear part, configured on an entrance of the at least one slot; and
a second wear part, configured on the other side of the entrance of the at least one slot;
wherein the first wear part further comprises a first bevel;
wherein the second wear part further comprises a second bevel;
wherein a third bevel is configured on connection between the second wear part and a middle portion of the at least one of the plurality of slots;
wherein the first bevel and the second bevel facilitate loading of the plurality of reticles into the reticle pod.
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